WaferScan™ – Wafer Bow & Warp Geometry

WaferScan is a big step forward in wafer thickness metrology. WaferScan utilizes Tamar's proprietary Optical Stylus (patent pending) technology to measure the thickness, warp, bow and other shape features of wafers, with high data density and high throughput. WaferScan allows the user to acquire thousands of data points on the surface and can measure thickness of conventional wafers as well as thin wafers and of any material. No optical constants are required and patterned or bumped wafers are easily addressed.


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WaferScan Specifications  
Measure Modes Scanning Mode for wafer thickness and wafer shape metrology
Scan Mode for bump coplanarity
Step Mode for bump height and vision X-Y measurements of bump diameter and shape
Stage Resolution 0.1 um (optional 0.05 um)
Objective Lenses 5x, 10x, 20x
Measurement Range 10 - 2000 um
  Micro bumps 15 - 25 micron use 20X,  Standard bumps 250 micron range, use 5X
Optional Features Fully Automatic Wafer or Substrate Handling
Bar code, serial number readers
Automated alignment
Optical Stylus Probe Single sided measurements for thin wafers uses Optical Stylus Probe Only
Dual sided measurement for Thick wafers & Etch Residual Thickness
Bump applications use single side Optical Stylus Probe with video microscope attachment

 

 

All Products

Dimensional Measurement Products:

ATMeasure - General Purpose Field-of-view Vision Metrology software
Applications: Semiconductor, Electronic Device and Packaging, Optics, Flat Panel Display, MEMS, Medical Device.

CDMeasure – Critical Dimension Measurement System
Applications: Semiconductor, Flat Panel Display, LED, Optics

Surface Measurement and Profiling Products:

WaferScan – Wafer Bow & Warp Geometry
Applications: Semiconductor, Flat Panel Display, Optics

HRT 3000 - Non-Contact Optical Profilometer
Applications: Semiconductor, Electronic Device and Packaging, Optics, Flat Panel Display, LED, MEMS, Hard Disk Drive

Automated Wafer Defect Inspection and Classification:

WaferInspect - Wafer Inspection System

Special Products:

EtherGlow Illumination - Patented Illumination Technology
Applications: General

Application Specific Systems - Customized Metrology and Defect Detection Systems
Applications: Semiconductor, Flat Panel Display, LED, MEMS, Hard Disk Drive

 
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