HRT 3000™ - Non-Contact Optical Profilometer

The HRT 3000 is a non-contact profilometer designed specifically to measure high aspect ratio trenches found in semiconductors and MEMS devices. The many features built into the HRT 3000 make it very flexible and allow it to operate in production as well as research environments. The software is both simple to use and powerful enough to solve numerous metrology problems.

Some of the many applications Tamar has addressed with the HRT 3000 are:

• High Aspect Ratio Trenches depth and width for semiconductors
• MEMS etch depth and width
• Fresnel lens step measurement
• Surface profile of optical components and crystals
• Solder bumps and micro bumps.
• Micro-fluidic chips
• Flat Panel Display Photo Spacer Height
• Flat Panel Display Layer Thickness

In addition to our standard HRT 3000, we routinely build specific configurations to solve specific applications.

Registration & PDF Download

HRT3000 Specifications
Objective Lens	Height Range (um)	Spot Size (um)	Height resolution (um)
5x	2000	15	0.5
10x	1000	11	0.1
20x	250	5	0.05
50x	40	2	0.01
Scan rates from .001 mm/sec to 25 mm/sec Scan distance up to 100 mm Samples rates 2 ms minimum Dynamic range 40dB Scans in any direction Dynamic integration option during scan Live video during scan High/Low pass filtering of data option before calculations Automatically calculated ANSI standard roughness/waviness Numerous other calculations available Raw Data export for offline processing