CDMeasure™ – Critical Dimension Measurement System

CDMeasure is a cost effective system for measuring line widths and critical dimensions on wafers and masks. All industry standard edge profile types are supported with an easy to use software interface. CDMeasure has various levels of automation options as well as many optical configurations to meet specific requirements.

CDMeasure can even be supplied as a software upgrade to existing microscopes. With autofocus, pattern recognition for skew removal, unlimited recipe storage, and the highest accuracy and repeatability available on an optical platform, CDMeasure is the solution of choice for production.


Registration & PDF Download

 

 

CDMeasure Specifications  
Sample Size 50 - 300 mm
Sample Type Silicon, Polysilicon, Oxide, Quartz, Reticle, Mask
Surface Etched, Photoresisted, Exposed
Handling Manual or Automatic
Repeatability 5 nm
Stage Resolution 0.1 um (optional 0.05 um)
Objective Lenses 5x, 10x, 20x, 50x, 100x, (optional 150x)
Illumination Software Controlled Reflective
Camera Digital Megapixel
Optional Features Laser Autofocus
Video Autofocus
Software Controlled Transmitted Light Stage
Rotary Index Table
Fully Programmable Mode
Closed Loop Stage Control
Fully Automatic Wafer or Substrate Handling

 


All Products

Dimensional Measurement Products:

ATMeasure - General Purpose Field-of-view Vision Metrology software
Applications: Semiconductor, Electronic Device and Packaging, Optics, Flat Panel Display, MEMS, Medical Device.

CDMeasure – Critical Dimension Measurement System
Applications: Semiconductor, Flat Panel Display, LED, Optics

Surface Measurement and Profiling Products:

WaferScan – Wafer Bow & Warp Geometry
Applications: Semiconductor, Flat Panel Display, Optics

HRT 3000 - Non-Contact Optical Profilometer
Applications: Semiconductor, Electronic Device and Packaging, Optics, Flat Panel Display, LED, MEMS, Hard Disk Drive

Automated Wafer Defect Inspection and Classification:

WaferInspect - Wafer Inspection System

Special Products:

EtherGlow Illumination - Patented Illumination Technology
Applications: General

Application Specific Systems - Customized Metrology and Defect Detection Systems
Applications: Semiconductor, Flat Panel Display, LED, MEMS, Hard Disk Drive

 
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