Application Notes
CDMeasure Measurement on Oxide Wafer - Etched
Unit: Microns
 
Site
  
Site
Meas # 1 2 3 4 5 Meas # 1 2 3 4 5
1 8.855 8.699 8.797 8.610 8.894 1 7.102 7.077 7.173 7.153 7.024
2 8.854 8.700 8.800 8.609 8.893 2 7.103 7.075 7.175 7.153 7.027
3 8.854 8.702 8.798 8.610 8.894 3 7.102 7.074 7.172 7.153 7.027
4 8.856 8.702 8.797 8.608 8.894 4 7.102 7.076 7.172 7.155 7.025
5 8.855 8.701 8.799 8.610 8.894 5 7.102 7.077 7.172 7.156 7.025
6 8.854 8.702 8.798 8.609 8.894 6 7.102 7.077 7.172 7.156 7.027
7 8.854 8.702 8.799 8.609 8.893 7 7.102 7.077 7.173 7.157 7.027
8 8.854 8.701 8.800 8.609 8.893 8 7.103 7.077 7.172 7.157 7.027
9 8.853 8.701 8.800 8.608 8.893 9 7.103 7.077 7.171 7.155 7.027
10 8.854 8.700 8.800 8.609 8.893 10 7.102 7.077 7.170 7.156 7.027
11 8.854 8.701 8.799 8.610 8.893 11 7.103 7.078 7.171 7.154 7.027
12 8.854 8.701 8.799 8.610 8.893 12 7.102 7.079 7.171 7.155 7.027
13 8.855 8.701 8.800 8.609 8.893 13 7.102 7.079 7.170 7.154 7.027
14 8.856 8.700 8.800 8.609 8.894 14 7.102 7.078 7.171 7.153 7.028
15 8.854 8.701 8.799 8.609 8.893 15 7.103 7.076 7.170 7.153 7.028
16 8.855 8.701 8.800 8.609 8.893 16 7.102 7.076 7.171 7.154 7.029
17 8.853 8.701 8.800 8.609 8.893 17 7.103 7.075 7.172 7.153 7.028
18 8.854 8.702 8.800 8.609 8.893 18 7.103 7.076 7.171 7.154 7.028
19 8.854 8.704 8.799 8.610 8.893 19 7.103 7.075 7.173 7.153 7.029
20 8.856 8.702 8.800 8.608 8.893 20 7.101 7.074 7.172 7.152 7.028
Average 8.854 8.701 8.799 8.609 8.893 Average 7.102 7.077 7.172 7.154 7.027
Sigma 1 0.001 0.001 0.001 0.001 0.000 Sigma 1 0.001 0.001 0.001 0.001 0.001

 

CDMeasure Measurement on Oxide Wafer - Developed Resist
Unit: Microns
 
Site
Meas # 1 2 3 4 5
1 5.292 5.223 5.292 5.208 5.324
2 5.292 5.221 5.292 5.209 5.326
3 5.291 5.224 5.292 5.209 5.323
4 5.294 5.225 5.294 5.209 5.321
5 5.293 5.225 5.293 5.210 5.321
6 5.294 5.225 5.293 5.212 5.321
7 5.293 5.229 5.294 5.213 5.322
8 5.295 5.226 5.293 5.211 5.323
9 5.295 5.230 5.294 5.216 5.323
10 5.293 5.228 5.295 5.215 5.324
11 5.292 5.229 5.295 5.218 5.324
12 5.292 5.228 5.295 5.218 5.324
13 5.291 5.227 5.294 5.219 5.324
14 5.291 5.223 5.294 5.219 5.324
15 5.291 5.223 5.296 5.222 5.325
16 5.289 5.224 5.297 5.223 5.323
17 5.289 5.225 5.294 5.221 5.323
18 5.288 5.224 5.295 5.224 5.323
19 5.288 5.224 5.294 5.224 5.323
20 5.290 5.223 5.296 5.225 5.323
Average 5.292 5.225 5.294 5.216 5.323
Sigma 1 0.002 0.002 0.001 0.006 0.001

 

CDMeasure Measurement on Silicon Wafer - Etched
Unit: Microns
 
Site
Meas # 1 2 3 4 5
1 5.527 5.505 5.338 5.535 5.332
2 5.528 5.503 5.337 5.535 5.331
3 5.528 5.502 5.336 5.536 5.329
4 5.525 5.503 5.338 5.536 5.332
5 5.525 5.504 5.338 5.539 5.331
6 5.524 5.507 5.337 5.539 5.330
7 5.524 5.505 5.338 5.541 5.331
8 5.526 5.505 5.335 5.540 5.332
9 5.525 5.504 5.334 5.538 5.336
10 5.526 5.504 5.334 5.536 5.335
11 5.526 5.505 5.337 5.539 5.335
12 5.526 5.505 5.334 5.540 5.336
13 5.530 5.505 5.338 5.538 5.333
14 5.528 5.507 5.341 5.539 5.336
15 5.529 5.505 5.338 5.539 5.335
16 5.528 5.506 5.340 5.540 5.335
17 5.529 5.505 5.340 5.538 5.338
18 5.526 5.506 5.339 5.539 5.335
19 5.529 5.507 5.340 5.544 5.335
20 5.531 5.506 5.339 5.541 5.333
Average 5.527 5.505 5.338 5.539 5.334
Sigma 1 0.002 0.001 0.002 0.002 0.002

 

CDMeasure Measurement on Silicon Wafer - Developed Resist
Unit: Microns
 
Site
  
Site
Meas # 1 2 3 4 5 Meas # 1 2 3 4 5
1 5.358 4.868 4.812 5.024 4.883 1 6.785 6.241 6.168 5.980 6.396
2 5.358 4.869 4.814 5.027 4.878 2 6.782 6.243 6.168 5.981 6.394
3 5.358 4.871 4.815 5.028 4.884 3 6.784 6.245 6.170 5.990 6.392
4 5.361 4.869 4.817 5.027 4.887 4 6.785 6.246 6.171 5.982 6.394
5 5.359 4.866 4.817 5.027 4.888 5 6.782 6.245 6.174 5.992 6.392
6 5.357 4.870 4.816 5.028 4.885 6 6.783 6.245 6.170 5.980 6.392
7 5.360 4.868 4.817 5.029 4.881 7 6.784 6.246 6.171 5.989 6.393
8 5.365 4.868 4.820 5.029 4.878 8 6.784 6.248 6.170 5.985 6.392
9 5.366 4.872 4.819 5.029 4.878 9 6.782 6.248 6.168 5.983 6.394
10 5.366 4.873 4.820 5.028 4.875 10 6.782 6.249 6.173 5.985 6.391
11 5.365 4.873 4.821 5.026 4.878 11 6.782 6.247 6.175 5.984 6.393
12 5.366 4.870 4.823 5.025 4.877 12 6.781 6.248 6.174 5.986 6.391
13 5.367 4.875 4.821 5.027 4.876 13 6.781 6.248 6.171 5.984 6.390
14 5.366 4.874 4.821 5.026 4.876 14 6.782 6.248 6.171 5.978 6.391
15 5.367 4.873 4.823 5.025 4.882 15 6.783 6.247 6.171 5.976 6.393
16 5.368 4.873 4.823 5.025 4.881 16 6.784 6.246 6.172 5.976 6.392
17 5.369 4.872 4.821 5.027 4.881 17 6.781 6.246 6.172 5.976 6.394
18 5.370 4.875 4.820 5.026 4.884 18 6.781 6.246 6.168 5.976 6.395
19 5.370 4.874 4.814 5.026 4.885 19 6.782 6.247 6.167 5.975 6.394
20 5.370 4.874 4.817 5.027 4.885 20 6.782 6.246 6.166 5.970 6.395
Average 5.364 4.878 4.819 5.027 4.881 Average 6.783 6.246 6.171 5.981 6.393
Sigma 1 0.005 0.003 0.003 0.001 0.004 Sigma 1 0.001 0.002 0.002 0.006 0.002

 

CDMeasure Measurement on Quartz Wafer - Developed Resist
Unit: Microns
 
Site
Meas # 1 2 3 4 5
1 0.568 0.571 0.585 0.585 0.582
2 0.566 0.574 0.583 0.583 0.582
3 0.571 0.575 0.583 0.583 0.582
4 0.569 0.574 0.581 0.581 0.583
5 0.568 0.572 0.584 0.584 0.580
6 0.566 0.573 0.582 0.582 0.582
7 0.568 0.574 0.582 0.582 0.578
8 0.564 0.574 0.579 0.579 0.582
9 0.568 0.574 0.585 0.585 0.584
10 0.566 0.572 0.582 0.582 0.580
11 0.565 0.574 0.582 0.582 0.582
12 0.566 0.574 0.579 0.579 0.581
13 0.566 0.574 0.581 0.581 0.582
14 0.568 0.576 0.583 0.583 0.580
15 0.565 0.573 0.582 0.582 0.582
16 0.568 0.574 0.582 0.582 0.580
17 0.566 0.573 0.584 0.584 0.581
18 0.567 0.574 0.582 0.582 0.580
19 0.566 0.573 0.582 0.582 0.580
20 0.565 0.573 0.582 0.582 0.581
Average 0.567 0.574 0.582 0.582 0.581
Sigma 1 0.002 0.001 0.002 0.002 0.001

 

CDMeasure Measurement on Polysilicon Wafer - Etched
Unit: Microns
 
Site
Meas # 1 2 3 4 5
1 1.655 1.664 1.660 1.704 1.626
2 1.659 1.664 1.655 1.704 1.622
3 1.664 1.659 1.660 1.704 1.622
4 1.662 1.662 1.656 1.706 1.622
5 1.662 1.658 1.661 1.705 1.621
6 1.654 1.660 1.652 1.705 1.621
7 1.658 1.659 1.659 1.704 1.618
8 1.659 1.660 1.658 1.703 1.620
9 1.661 1.663 1.664 1.704 1.619
10 1.655 1.659 1.660 1.702 1.620
11 1.658 1.659 1.655 1.704 1.628
12 1.653 1.659 1.659 1.703 1.622
13 1.661 1.657 1.659 1.703 1.624
14 1.663 1.659 1.666 1.702 1.624
15 1.657 1.662 1.662 1.704 1.625
16 1.663 1.659 1.662 1.704 1.623
17 1.649 1.660 1.661 1.703 1.620
18 1.651 1.656 1.661 1.704 1.618
19 1.660 1.656 1.657 1.704 1.625
20 1.656 1.654 1.664 1.704 1.622
Average 1.658 1.659 1.660 1.704 1.622
Sigma 1 0.004 0.003 0.003 0.001 0.003

 

CDMeasure Measurement on Wafer with Thick Resist
Unit: Microns
CDX CDY
 
Site
  
Site
Meas # 1 2 3 4 5 Meas # 1 2 3 4 5
1 34.805 35.084 35.077 34.703 34.709 1 59.062 59.256 59.115 58.753 58.827
2 34.804 35.084 35.077 34.703 34.707 2 59.064 59.258 59.115 58.752 58.828
3 34.805 35.084 35.077 34.702 34.708 3 59.063 59.257 59.115 58.753 58.828
4 34.805 35.082 35.077 34.701 34.707 4 59.063 59.257 59.115 58.751 58.829
5 34.804 35.082 35.076 34.703 34.706 5 59.063 59.255 59.114 58.75 58.826
6 34.804 35.082 35.076 34.703 34.706 6 59.062 59.256 59.113 58.751 58.828
7 34.805 35.081 35.077 34.702 34.706 7 59.062 59.256 59.113 58.75 58.826
8 34.805 35.082 35.077 34.702 34.706 8 59.062 59.255 59.113 58.751 58.827
9 34.804 35.081 35.077 34.701 34.706 9 59.062 59.256 59.113 58.749 58.827
10 34.805 35.082 35.077 34.701 34.706 10 59.063 59.257 59.114 58.75 58.827
11 34.805 35.080 35.077 34.702 34.706 11 59.062 59.256 59.113 58.75 58.826
12 34.805 35.080 35.077 34.700 34.706 12 59.062 59.256 59.113 58.75 58.827
13 34.805 35.081 35.076 34.699 34.706 13 59.062 59.256 59.113 58.75 58.827
14 34.805 35.080 35.076 34.699 34.705 14 59.062 59.256 59.112 58.751 58.826
15 34.805 35.080 35.075 34.701 34.705 15 59.062 59.255 59.112 58.749 58.827
16 34.804 35.080 35.076 34.699 34.705 16 59.062 59.256 59.112 58.749 58.826
17 34.804 35.081 35.076 34.699 34.704 17 59.063 59.257 59.112 58.748 58.828
18 34.805 35.080 35.077 34.699 34.704 18 59.062 59.256 59.113 58.749 58.826
19 34.805 35.079 35.078 34.697 34.705 19 59.064 59.257 59.112 58.748 58.827
20 34.804 35.080 35.077 34.697 34.706 20 59.062 59.256 59.111 58.749 58.825
Average 34.805 35.081 35.077 34.701 34.706 Average 59.062 59.256 59.113 58.750 58.827
Sigma 1 0.000 0.001 0.001 0.002 0.001 Sigma 1 0.001 0.001 0.001 0.001 0.001



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